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\u4ece\u4e1a\u8005\u76f4\u8a00\uff1a“\u6253\u5b54\u76f8\u5bf9\u7b80\u5355\uff0c\u7535\u9540\u624d\u662f\u6700\u96be\u7684\u3002\u73bb\u7483\u5b54\u591a\u3001\u5b54\u5f84\u7a84\u4e14\u5bc6\uff0c\u8981\u4fdd\u8bc1\u6bcf\u4e00\u9897\u5b54\u5185\u7684\u94dc\u586b\u5145\u4e00\u81f4\u6027\uff0c\u907f\u514d\u51fa\u73b0\u7a7a\u8154\u4f53\u3002\u4e00\u65e6\u6709\u7a7a\u6d1e\uff0c\u4e0d\u4ec5\u5bfc\u7535\u5931\u6548\uff0c\u70ed\u5e94\u529b\u4e0b\u8fd8\u4f1a\u5bfc\u81f4\u73bb\u7483\u7834\u788e\u3002”\u53e6\u4e00\u540d\u4e1a\u5185\u4eba\u58eb\u8fdb\u4e00\u6b65\u6307\u51fa\uff1aTGV\u6700\u5927\u7684\u5361\u70b9\u662f\u826f\u7387\u63a7\u5236\uff0c\u5305\u62ec\u5fae\u88c2\u7eb9\u3001\u586b\u6ee1\u4e0d\u826f\u7b49\u95ee\u9898\uff0c\u4e14\u90e8\u5206\u95ee\u9898\u5728\u53ef\u9760\u6027\u5e94\u7528\u4e2d\u624d\u4f1a\u66b4\u9732\u3002\u4ed6\u5efa\u8bae\u4ea7\u4e1a\u754c\u5148\u4ecewafer level\uff08\u6676\u5706\u7ea7\uff09\u4e1a\u52a1\u843d\u5730\uff0c\u901a\u8fc7\u5177\u4f53\u4ea7\u54c1\u7275\u5f15\u548c\u9a8c\u8bc1\u6765\u7a33\u56fa\u826f\u7387\u548c\u53ef\u9760\u6027\uff0c\u518d\u5411panel level\uff08\u9762\u677f\u7ea7\uff09\u53d1\u5c55\u4ee5\u964d\u4f4e\u6210\u672c\u3001\u63d0\u5347\u6548\u7387\u3002<\/p>\n

\u4e00\u540dCMP\u8bbe\u5907\u4ece\u4e1a\u8005\u8868\u793a\uff0c\u6838\u5fc3\u95ee\u9898\u96c6\u4e2d\u5728\u7535\u9540\u5747\u5300\u6027\u548c\u5b54\u7684\u586b\u5b9e\u5ea6\u4e24\u5927\u7ef4\u5ea6\u3002\u4ed6\u8868\u793a\uff0c\u524d\u6bb5\u65f6\u95f4\u7684\u6253\u6837\u8fc7\u7a0b\u4e2d\u5c31\u9891\u7e41\u51fa\u73b0\u7a7a\u5b54\u672a\u9540\u5b9e\u7684\u60c5\u51b5\u3002\u8fd9\u79cd\u8d28\u91cf\u7f3a\u9677\u4f1a\u5f15\u53d1\u4e25\u91cd\u7684\u8fde\u9501\u53cd\u5e94\uff1a\u4e0d\u4ec5\u76f4\u63a5\u5bfc\u81f4\u5bfc\u7535\u5931\u6548\u548c\u70ed\u5e94\u529b\u4e0b\u7684\u73bb\u7483\u7834\u788e\uff0c\u66f4\u8ba9\u4e0b\u6e38\u4f01\u4e1a\u4e0d\u6562\u8d38\u7136\u91c7\u8d2d\u540e\u7eed\u7684 CMP\uff08\u5316\u5b66\u673a\u68b0\u629b\u5149\uff09\u8bbe\u5907\uff0c\u4e00\u65e6\u7535\u9540\u73af\u8282\u7684\u826f\u7387\u65e0\u6cd5\u4fdd\u8bc1\uff0c\u6602\u8d35\u7684 CMP \u8bbe\u5907\u6295\u5165\u5c06\u9762\u4e34\u5de8\u5927\u7684\u95f2\u7f6e\u98ce\u9669<\/a>\u3002<\/p>\n

\u76ee\u524d\u56fd\u5185\u505a\u73bb\u7483\u57fa\u677f\u52a0\u5de5\u8f83\u65e9\u7684\u4f01\u4e1a\u5305\u62ec\u4eac\u4e1c\u65b9\u3001\u6c83\u683c\u5149\u7535\uff08\u901a\u683c\u5fae\uff09\u3001\u53a6\u95e8\u4e91\u5929\u3001\u4f5b\u667a\u82af\u3001\u4e09\u53e0\u7eaa\uff08\u8fc8\u79d1\uff09\u3001\u5b89\u6377\u5229\u7f8e\u7ef4\u3001\u6210\u90fd\u5955\u6210\u7b49\uff0c\u4f46\u8fd9\u4e9b\u4f01\u4e1a\u666e\u904d CMP \u8bbe\u5907\u8d2d\u4e70\u91cf\u6781\u5c11\uff0c\u6839\u672c\u539f\u56e0\u6b63\u662f\u7535\u9540\u73af\u8282\u7684\u74f6\u9888\u5c1a\u672a\u7a81\u7834\u3002\u4e3a\u4e86\u6ee1\u8db3\u9ad8\u7cbe\u5ea6\u4ea7\u54c1\u7684\u6253\u6837\u548c\u5c0f\u6279\u91cf\u751f\u4ea7\u9700\u6c42\uff0c\u4e0d\u5c11\u4f01\u4e1a\u53ea\u80fd\u9009\u62e9\u5c06\u6837\u54c1\u9001\u5f80\u97e9\u56fd\u4ee3\u5de5\uff0c\u4f46\u8fd9\u4e00\u65b9\u6848\u6210\u672c\u6781\u9ad8\uff0c\u4e14\u9762\u4e34\u4e25\u5cfb\u7684\u8fd0\u8f93\u96be\u9898\uff1a\u73bb\u7483\u57fa\u677f\u5c3a\u5bf8\u5927\u3001\u53c8\u8584\u53c8\u8106\uff0c\u6781\u6613\u5728\u8fd0\u8f93\u8fc7\u7a0b\u4e2d\u7834\u788e\uff0c\u4f01\u4e1a\u4e0d\u6562\u901a\u8fc7\u5feb\u9012<\/a>\u5bc4\u9001\uff0c\u53ea\u80fd\u91c7\u7528\u5ba2\u6237\u81ea\u63d0\u3001\u4e13\u4eba\u4e13\u8f66\u62a4\u9001\u751a\u81f3\u4eba\u5de5\u643a\u5e26\u7684\u65b9\u5f0f\uff0c\u6781\u5927\u589e\u52a0\u4e86\u65f6\u95f4\u548c\u7ecf\u6d4e\u6210\u672c\u3002<\/p>\n

\u8fd9\u610f\u5473\u7740\uff0cTGV \u7684 “10:1 \u6df1\u5bbd\u6bd4” \u5728\u5b9e\u9a8c\u5ba4\u4e2d\u5df2\u5b9e\u73b0\uff0c\u4f46\u4ece\u5b9e\u9a8c\u5ba4\u5230\u4ea7\u7ebf\uff0c\u4e2d\u95f4\u9694\u7740\u826f\u7387\u3001\u53ef\u9760\u6027\u548c\u4e00\u81f4\u6027\u4e09\u5ea7\u5927\u5c71\u3002<\/p>\n

\u8bbe\u5907\u4e0e\u6750\u6599\uff1a\u85cf\u5728\u4ea7\u4e1a\u94fe\u6df1\u5904\u7684“\u5361\u8116\u5b50”<\/strong><\/h2>\n

\u73bb\u7483\u57fa\u677f\u4ea7\u4e1a\u94fe\u4e0a\uff0c\u8bbe\u5907\u6295\u8d44\u5355\u6761\u4ea7\u7ebf\u8d85\u8fc71\u4ebf\u7f8e\u5143\u3002\u4f46\u5de8\u989d\u6295\u8d44\u7684\u80cc\u540e\uff0c\u662f\u5927\u91cf\u7ec6\u5206\u73af\u8282\u4ecd\u4f9d\u8d56\u8fdb\u53e3\u6216\u5c1a\u672a\u6210\u719f\u3002<\/p>\n

\u8d85\u8584\u73bb\u7483\u7684“\u975e\u63a5\u89e6\u5f0f\u642c\u8fd0”<\/strong><\/p>\n

\u5728\u73bb\u7483\u57fa\u677f\u52a0\u5de5\u4e2d\uff0c\u4e00\u4e2a\u6781\u6613\u88ab\u5ffd\u89c6\u5374\u81f3\u5173\u91cd\u8981\u7684\u73af\u8282\u662f\u642c\u8fd0\u3002<\/p>\n

\u82cf\u5dde\u65b0\u541b\u6b63\u4ee3\u7406\u7684\u65e5\u672c\u8fdb\u53e3\u4f2f\u52aa\u5229\u6676\u5706\u624b\u6307\uff0c\u4e13\u95e8\u7528\u4e8e\u73bb\u7483\u57fa\u677f\u7684\u975e\u63a5\u89e6\u5f0f\u642c\u8fd0\u3002\u5176\u539f\u7406\u662f\u5229\u7528“\u6d41\u901f\u5feb\u3001\u6c14\u538b\u4f4e”\u7684\u4f2f\u52aa\u5229\u6548\u5e94\uff0c\u901a\u8fc7\u6c14\u538b\u5c06\u4ea7\u54c1“\u6258\u4e3e”\u8d77\u6765\uff0c\u914d\u5408\u7535\u78c1\u9600\u548c\u538b\u529b\u8868\u5c06\u538b\u529b\u4e25\u683c\u63a7\u5236\u57280.35\u5146\u5e15\u4ee5\u5185\u3002<\/p>\n

“\u73bb\u7483\u57fa\u677f\u5f88\u8106\uff0c\u4e14\u539a\u5ea6\u6781\u8584\uff0c\u76ee\u524d\u80fd\u505a\u52300.1\u51e0\u6beb\u7c73\uff0c”\u8be5\u4f9b\u5e94\u5546\u4ecb\u7ecd\uff0c“\u771f\u7a7a\u5438\u9644\u5bb9\u6613\u7559\u4e0b\u786c\u75d5\uff0c\u800c\u4f2f\u52aa\u5229\u6676\u5706\u624b\u6307\u662f\u975e\u63a5\u89e6\u5f0f\u7684\uff0c\u4e0d\u4f1a\u635f\u4f24\u4ea7\u54c1\u3002\u4f46\u4f2f\u52aa\u5229\u6676\u5706\u624b\u6307\u6210\u672c\u6bd4\u771f\u7a7a\u5438\u9644\u539f\u7406\u7684\u4ea7\u54c1\u9ad8\u5f88\u591a\uff0c\u8bbe\u5907\u8d35\u3001\u96be\u505a\uff0c\u7532\u65b9\u4f1a\u7b97\u56de\u62a5\u7387\uff0c\u770b\u91cd\u4ea7\u54c1\u6548\u7387\u548c\u7834\u635f\u7387\u3002”<\/p>\n

\u76ee\u524d\uff0c200\u5fae\u7c73\u4ee5\u4e0b\u7684\u8d85\u8584\u73bb\u7483\u57fa\u677f\u642c\u8fd0\u8bbe\u5907\u4e3b\u8981\u4ece\u65e5\u672c\u8fdb\u53e3\u3002\u4e0d\u8fc7\uff0c\u76ee\u524d\u4e0b\u6e38\u5ba2\u6237\u5df2\u8981\u6c42\u5728\u4e2d\u56fd\u751f\u4ea7\uff0c\u65e5\u672c\u65b9\u9762\u63d0\u4f9b\u56fe\u7eb8\u548c\u7cfb\u7edf\uff0c\u4e2d\u56fd\u4f9b\u5e94\u5546\u7ecf\u65e5\u672c\u5ba1\u6838\u5408\u683c\u540e\u624d\u80fd\u4f9b\u8d27\uff0c\u4ee5\u4fdd\u8bc1“\u80fd\u7a33\u5b9a5\u5e74\u300110\u5e74\u6ca1\u95ee\u9898”\u7684\u6781\u81f4\u7a33\u5b9a\u6027\u3002<\/p>\n

\u8fd9\u4e00\u7ec6\u8282\u6298\u5c04\u51fa\u73bb\u7483\u57fa\u677f\u4ea7\u4e1a\u7684\u6574\u4f53\u56f0\u5883\uff1a\u534a\u5bfc\u4f53\u884c\u4e1a\u5bf9\u6027\u80fd\u8981\u6c42\u672a\u5fc5\u6781\u9ad8\uff0c\u4f46\u5bf9\u7a33\u5b9a\u6027\u7684\u8981\u6c42\u8fd1\u4e4e\u82db\u523b\u3002\u4efb\u4f55\u4e00\u4e2a\u73af\u8282\u7684\u5fae\u5c0f\u6ce2\u52a8\uff0c\u90fd\u4f1a\u5728\u540e\u7eed\u5de5\u827a\u4e2d\u88ab\u6307\u6570\u7ea7\u653e\u5927\u3002<\/p>\n

\u6fc0\u5149\u4e0e\u7535\u9540\uff1a\u56fd\u4ea7\u66ff\u4ee3\u7684\u4e24\u6781<\/strong><\/p>\n

\u5728TGV\u6fc0\u5149\u94bb\u5b54\u73af\u8282\uff0c\u56fd\u4ea7\u8bbe\u5907\u5df2\u5177\u5907\u4e00\u5b9a\u7ade\u4e89\u529b\u3002\u5927\u65cf\u6fc0\u5149\u5360\u636e\u56fd\u5185\u6676\u5706\u7ea7TGV\u8bbe\u5907\u9f99\u5934\u5730\u4f4d\uff0c\u572d\u534e\u667a\u80fd\u5728\u6fc0\u5149\u8f85\u52a9\u6df7\u5408\u523b\u8680\u9886\u57df\u83b7\u5f97\u8ba4\u53ef\u3002\u5e1d\u5c14\u6fc0\u5149\u7b49\u4f01\u4e1a\u4e5f\u5728\u98de\u79d2\u6fc0\u5149\u8bf1\u5bfc\u5de5\u827a\u4e0a\u6df1\u5ea6\u5e03\u5c40\u3002\u4f46\u5728PVD\u9540\u819c\u3001\u7535\u9540\u8bbe\u5907\u3001\u68c0\u6d4b\u8bbe\u5907\u7b49\u73af\u8282\uff0c\u4f9d\u8d56\u8fdb\u53e3\u4ecd\u662f\u73b0\u5b9e\u3002\u7279\u522b\u662f\u7535\u9540\u586b\u94dc\u8bbe\u5907\uff0c\u76f4\u63a5\u51b3\u5b9a\u4e86TGV\u7684\u826f\u7387\u4e0a\u9650\uff0c\u800c\u56fd\u5185\u5728\u8fd9\u4e00\u5de5\u827a\u4e0a\u7684\u8bbe\u5907\u80fd\u529b\u660e\u663e\u5f31\u4e8e\u6fc0\u5149\u6253\u5b54\u3002<\/p>\n

\u6750\u6599\u7aef\u540c\u6837\u5982\u6b64\u3002\u9ad8\u7eaf TGV \u73bb\u7483\u539f\u7247\u76ee\u524d\u4e3b\u8981\u4f9d\u8d56\u8096\u7279\uff08SCHOTT\uff09\u3001\u5eb7\u5b81\uff08Corning\uff09\u3001\u65ed\u785d\u5b50\uff08AGC\uff09\u7b49\u65e5\u7f8e\u4f01\u4e1a\u3002\u56fd\u5185\u4f01\u4e1a\u5982\u5f69\u8679\u80a1\u4efd\u867d\u5728 TGV \u73bb\u7483\u539f\u7247\u9886\u57df\u53d6\u5f97\u4e86\u4e00\u5b9a\u8fdb\u5c55\uff0c\u4f46\u6574\u4f53\u4ea7\u54c1\u5f3a\u5ea6\u4ecd\u4e0d\u5982\u56fd\u5916\u54c1\u724c\uff0c\u5f88\u591a\u56fd\u4ea7\u73bb\u7483\u5728\u6fc0\u5149\u6253\u5b54\u3001\u6e7f\u6cd5\u523b\u8680\u7b49\u52a0\u5de5\u8fc7\u7a0b\u4e2d\u5bb9\u6613\u51fa\u73b0\u7834\u788e\u95ee\u9898\uff0c\u5bfc\u81f4\u826f\u7387\u5927\u5e45\u4e0b\u964d\uff0c\u76ee\u524d\u5c1a\u672a\u80fd\u5b9e\u73b0\u5927\u89c4\u6a21\u66ff\u4ee3\u3002\u56fd\u4ea7\u73bb\u7483\u914d\u65b9\u548c\u6253\u5b54\u5de5\u827a\u7684\u6838\u5fc3\u4e13\u5229\u4e5f\u4ecd\u88ab\u6d77\u5916\u5784\u65ad\u3002<\/p>\n

\u6807\u51c6\u4e0e\u4e2d\u8bd5\u5e73\u53f0\u7f3a\u5931<\/strong><\/h2>\n

\u5982\u679c\u8bf4\u6280\u672f\u548c\u8bbe\u5907\u662f“\u786c\u7ea6\u675f”\uff0c\u90a3\u4e48\u4ea7\u4e1a\u751f\u6001\u7684“\u8f6f\u73af\u5883”\u5219\u662f\u51b3\u5b9a\u73bb\u7483\u57fa\u677f\u80fd\u5426\u4ece“\u6837\u54c1”\u8d70\u5411“\u5546\u54c1”\u7684\u5173\u952e\u3002\u65e0\u6210\u719f\u7ecf\u9a8c\u53c2\u8003\u662f\u5f53\u524d\u73bb\u7483\u57fa\u677f\u56db\u5927\u75db\u70b9\u4e4b\u9996\uff1a\u6280\u672f\u8def\u7ebf\u4e0d\u786e\u5b9a\u3001\u6807\u51c6\u4f53\u7cfb\u7f3a\u5931\u3001\u826f\u7387\u722c\u5761\u56f0\u96be\u3002\u4e00\u4f4d\u4e0b\u6e38\u5ba2\u6237\u5efa\u8bae\uff1a“\u4ea7\u4e1a\u5e94\u5236\u5b9a\u7edf\u4e00\u7684\u57fa\u677f\u89c4\u8303\uff0c\u6db5\u76d6\u7fd8\u66f2\u3001\u957f\u5bbd\u6bd4\u7b49\u57fa\u7840\u6307\u6807\u3002\u6807\u51c6\u4e0d\u901a\u7528\uff0c\u4f1a\u5bfc\u81f4\u8bbe\u8ba1\u7aef\u3001\u5236\u9020\u7aef\u3001\u5c01\u6d4b\u7aef\u5404\u81ea\u4e3a\u6218\uff0c\u53cd\u590d\u8bd5\u9519\u3002”<\/p>\n

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