{"id":773266,"date":"2026-05-05T09:55:44","date_gmt":"2026-05-05T01:55:44","guid":{"rendered":"https:\/\/www.alphaseek.cn\/?p=773266"},"modified":"2026-05-05T09:55:44","modified_gmt":"2026-05-05T01:55:44","slug":"%e7%bb%95%e8%bf%87%e9%a1%b6%e7%ba%a7euv%ef%bc%8c%e6%99%b6%e5%9c%86%e4%b8%80%e5%93%a5%e7%9a%84%e5%ba%95%e7%89%8c%e7%bb%88%e4%ba%8e%e6%91%8a%e5%bc%80","status":"publish","type":"post","link":"https:\/\/www.alphaseek.cn\/?p=773266","title":{"rendered":"\u7ed5\u8fc7\u9876\u7ea7EUV\uff0c\u6676\u5706\u4e00\u54e5\u7684\u5e95\u724c\u7ec8\u4e8e\u644a\u5f00"},"content":{"rendered":"
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\u6587 | \u534a\u5bfc\u4f53\u4ea7\u4e1a\u7eb5\u6a2a<\/p>\n<\/blockquote>\n<\/div>\n

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\n

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\u968f\u7740A13\u4e0eA12\u4e8e2029\u5e74\u6295\u5165\u91cf\u4ea7\uff0c<\/strong>\u8fd9\u4e5f\u6807\u5fd7\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5c06\u6b63\u5f0f\u8de8\u5165“\u4e9a\u7eb3\u7c73”\u65f6\u4ee3\u3002\u503c\u5f97\u5173\u6ce8\u7684\u662f\uff0c\u5c3d\u7ba1\u53f0\u79ef\u7535\u5df2\u7a81\u78342nm\u4ee5\u4e0b\u5de5\u827a\u58c1\u5792\uff0c\u5374\u8fdf\u8fdf\u672a\u5c06 High-NA EUV \u8bbe\u5907\u7eb3\u5165\u4ea7\u7ebf\u89c4\u5212\u3002\u53f0\u79ef\u7535\u6562\u4e8e\u505a\u51fa\u8fd9\u4e00\u51b3\u7b56\u7684\u5e95\u6c14\u4f55\u5728\uff1f\u80cc\u540e\u53c8\u6697\u85cf\u7740\u600e\u6837\u7684\u4ea7\u4e1a\u903b\u8f91\uff1f<\/p>\n

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\n

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\u5173\u4e8eHigh-NA EUV\u7684\u5e94\u7528\u60c5\u51b5\uff0c\u4e09\u661f\u7535\u5b50\u4e8e2025\u5e743\u6708\u7387\u5148\u5b89\u88c5\u9996\u53f0High-NA EUV\u5149\u523b\u673a\u7528\u4e8e1.4\u7eb3\u7c73\u82af\u7247\u751f\u4ea7\uff0c\u540c\u5e74\u65a5\u8d441.1\u4e07\u4ebf\u97e9\u5143\u5f15\u8fdb\u4e24\u53f0EXE:5000\u578b\u53f7\u8bbe\u5907\uff0c\u8ba1\u5212\u57282025\u5e74\u5e95\u548c2026\u5e74\u521d\u5206\u522b\u4ea4\u4ed8\u4e00\u5957\uff0c\u7528\u4e8e\u51762nm\u5236\u7a0b\u7684\u5168\u9762\u751f\u4ea7\uff0c\u5176\u4e2d\u4e00\u5957\u5c06\u90e8\u7f72\u5728\u534e\u57ce\u5382\u533a\uff0c\u53e6\u4e00\u5957\u5219\u53ef\u80fd\u90e8\u7f72\u5728\u6cf0\u52d2\u6676\u5706\u5382\u3002<\/p>\n

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\u82f1\u7279\u5c14CEO\u9648\u7acb\u6b66\u5728CES 2026\u671f\u95f4\u900f\u9732\uff0c\u516c\u53f8\u6b63\u5927\u529b\u8fdb\u519b14A\uff081.4nm\uff09\u5236\u7a0b\u5de5\u827a\uff0c\u5e76\u5df2\u5411\u90e8\u5206\u5ba2\u6237\u63d0\u4f9bPDK\uff0c\u6216\u5df2\u6709\u5916\u90e8\u5ba2\u6237\u3002\u503c\u5f97\u6ce8\u610f\u7684\u662f\uff0c4\u670823\u65e5\uff0c\u9a6c\u65af\u514b<\/a>\u5728\u7279\u65af\u62c9\u8d22\u62a5\u7535\u8bdd\u4f1a\u4e0a\u62ab\u9732\u4e86TERAFAB\u82af\u7247\u5de5\u5382\u9879\u76ee\u7684\u6838\u5fc3\u843d\u5730\u7ec6\u8282\u3002\u8be5\u9879\u76ee\u786e\u5b9a\u91c7\u7528Intel 14A\uff081.4nm\u7ea7\uff09\u5148\u8fdb\u5236\u7a0b\u5de5\u827a\uff0c\u8ba1\u5212\u57282027\u5e74\u81f32029\u5e74\u95f4\u5efa\u6210\u81ea\u6709\u4ea7\u80fd\u5e76\u5b9e\u73b0\u89c4\u6a21\u5316\u91cf\u4ea7\u3002\u76ee\u524d\uff0c\u53cc\u65b9\u6b63\u5c31\u6280\u672f\u6388\u6743\u53ca\u5177\u4f53\u5408\u4f5c\u6761\u6b3e\u8fdb\u884c\u6c9f\u901a\u3002<\/p>\n

\u6839\u636e\u82f1\u7279\u5c14\u6b64\u524d\u6676\u5706\u4ee3\u5de5\u84dd\u56fe\u663e\u793a\uff0cIntel 10A\uff081nm\u5236\u7a0b\uff09\u5c06\u4e8e2027\u5e74\u5e95\u6295\u5165\u751f\u4ea7\/\u5f00\u53d1\uff08\u975e\u91cf\u4ea7\uff09\uff0c\u6807\u5fd7\u7740\u8be5\u516c\u53f8\u9996\u4e2a1nm\u8282\u70b9\u7684\u5230\u6765\u3002<\/p>\n

\u5173\u4e8eHigh-NA EUV\u7684\u5e94\u7528\u60c5\u51b5\uff0c\u82f1\u7279\u5c14\u9996\u5e2d\u8d22\u52a1\u5b98\uff08CFO\uff09David Zinsner\u5728\u82b1\u65d7 2025 \u5e74\u5168\u7403 TMT \u5927\u4f1a\u4e0a\u8868\u793a,\u4e0b\u4e00\u4ee3\u7684Intel 14A\u5236\u7a0b\u6280\u672f\u5c06\u662f\u82f1\u7279\u5c14\u4e3a\u4ee3\u5de5\u5ba2\u6237\u4ece\u5934\u5f00\u59cb\u8bbe\u8ba1\u7b2c\u4e00\u4e2a\u5c16\u7aef\u5236\u9020\u5de5\u827a\uff0c\u56e0\u4e3a\u5176\u5c06\u4f7f\u7528ASML\u6700\u65b0\u76840.55NA\uff08\u6570\u503c\u5b54\u5f84\uff09\u7684High-NA EUV\u5149\u523b\u673aTwinscan EXE\uff1a5200B\u3002<\/p>\n

\u5982\u6b64\u6765\u770b\uff0c\u4e09\u661f\u662f\u6700\u65e9\u5f00\u59cb\u4f7f\u7528High-NA EUV\u5149\u523b\u673a\u7684\u516c\u53f8\u3002<\/p>\n

032nm→1.2nm\uff0c\u53f0\u79ef\u7535\u4e3a\u4f55\u6562\u5f03\u7528High-NA EUV\uff1f<\/strong><\/h2>\n

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\u5728\u53f0\u79ef\u7535 2nm\u30011.6nm\uff08A16\uff09\u4e43\u81f3 1.2nm\uff08A12\uff09\u7b49\u66f4\u5148\u8fdb\u5236\u7a0b\u7684\u91cf\u4ea7\u653b\u575a\u4e2d\uff0c\u539f\u5b50\u5c42\u523b\u8680\u7edd\u975e\u8f85\u52a9\u5de5\u827a\u3002\u533a\u522b\u4e8e\u4f20\u7edf\u5e72\u6cd5\u523b\u8680\u7684“\u7c97\u653e\u5f0f”\u52a0\u5de5\uff0cALE \u4ee5\u539f\u5b50\u7ea7\u7cbe\u51c6\u63a7\u5236\u4e3a\u6838\u5fc3\u4f18\u52bf\uff0c\u6bcf\u6b21\u5faa\u73af\u4ec5\u53bb\u9664\u7ea6 0.1–1nm \u7684\u6750\u6599\u539a\u5ea6\uff0c\u5b8c\u7f8e\u9002\u914d\u53f0\u79ef\u7535 GAA \u7eb3\u7c73\u7247\u6676\u4f53\u7ba1\u67b6\u6784\u7684\u4e25\u82db\u8981\u6c42\u3002\u540c\u65f6\uff0cALE \u5177\u5907\u6781\u4f73\u7684\u5168\u57df\u5747\u5300\u6027\uff0c\u53ef\u5c06\u6676\u5706\u8868\u9762\u7c97\u7cd9\u5ea6\u63a7\u5236\u5728 0.3nm \u4ee5\u5185\uff0c\u5de5\u827a\u6027\u80fd\u8f83\u4f20\u7edf\u5e72\u6cd5\u523b\u8680\u63d0\u5347\u4e09\u500d\u4ee5\u4e0a\u3002<\/p>\n

\u672c\u8d28\u4e0a\uff0c\u53f0\u79ef\u7535\u7684\u7b56\u7565\u5e76\u975e“\u653e\u5f03\u5149\u523b”\uff0c\u800c\u662f\u901a\u8fc7\u534f\u540c\u5fae\u7f29\uff0c\u5c06\u81ea\u5df1\u7684\u4f18\u52bf\u9886\u57df\u53d1\u6325\u5230\u6781\u81f4\uff0c\u5f25\u8865\u4e86\u4e0d\u4f7f\u7528High-NA EUV\u7684\u77ed\u677f\uff0c\u540c\u65f6\u907f\u5f00\u4e86ASML\u7684\u6280\u672f\u5784\u65ad\u4e0e\u5929\u4ef7\u6210\u672c\u9677\u9631\u3002<\/p>\n

\u8981\u77e5\u9053\u5355\u53f0 High-NA EUV \u5149\u523b\u673a\u5b9a\u4ef7\u9ad8\u8fbe 3.5 \u4ebf\u6b27\u5143\uff0c\u6298\u5408\u8fd1 4 \u4ebf\u7f8e\u5143\uff0c\u76f8\u8f83\u73b0\u6709\u91cf\u4ea7 EUV \u673a\u578b\u6210\u672c\u5b9e\u73b0\u7ffb\u500d\u3002\u53f0\u79ef\u7535\u521b\u59cb\u4eba\u5f20\u5fe0\u8c0b\u4e5f\u66fe\u516c\u5f00\u8bc4\u4ef7\uff0c\u65b0\u4e00\u4ee3 High-NA EUV \u8bbe\u5907\u5177\u5907\u6781\u9ad8\u7684\u91c7\u8d2d\u4e0e\u843d\u5730\u6210\u672c\u3002<\/p>\n

\u636e\u6089\uff0c\u53f0\u79ef\u7535\u5df2\u5c06\u4e2d\u957f\u671f\u6bdb\u5229\u7387\u76ee\u6807\u9501\u5b9a\u81f3 56% \u4ee5\u4e0a\uff0c\u76f8\u8f83\u4e8e\u8fc7\u5f80 50% \u7684\u57fa\u51c6\u76ee\u6807\u5f62\u6210\u663e\u8457\u62ac\u5347\u3002\u6bdb\u5229\u7387\u6570\u4e2a\u767e\u5206\u70b9\u7684\u6ce2\u52a8\uff0c\u5c06\u76f4\u63a5\u8f6c\u5316\u4e3a\u6bcf\u5e74 50 \u4ebf\u81f3 100 \u4ebf\u7f8e\u5143\u7684\u5229\u6da6\u5dee\u989d\uff0c\u6210\u672c\u7aef\u7684\u521a\u6027\u4e0a\u6da8\u4f1a\u76f4\u63a5\u51b2\u51fb\u5176\u76c8\u5229\u9884\u671f\u3002<\/p>\n

(\u6765\u6e90\uff1a\u949b\u5a92\u4f53)<\/p>\n","protected":false},"excerpt":{"rendered":"

\u6587 | \u534a\u5bfc\u4f53\u4ea7\u4e1a\u7eb5\u6a2a \u5f53\u534a\u5bfc\u4f53\u884c\u4e1a\u6380\u8d77High-NA EUV\u5149\u523b\u673a\u62a2\u8d2d\u70ed\u6f6e\u65f6\uff0c\u53f0\u79ef\u7535\u4f3c\u4e4e\u5e76\u6ca1\u6709\u8fd9\u9879\u8ba1\u5212\uff0c\u751a\u81f3 […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[6],"tags":[148,241,88,367,339,159,192,376,303],"views":1,"_links":{"self":[{"href":"https:\/\/www.alphaseek.cn\/index.php?rest_route=\/wp\/v2\/posts\/773266"}],"collection":[{"href":"https:\/\/www.alphaseek.cn\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.alphaseek.cn\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.alphaseek.cn\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.alphaseek.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=773266"}],"version-history":[{"count":0,"href":"https:\/\/www.alphaseek.cn\/index.php?rest_route=\/wp\/v2\/posts\/773266\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.alphaseek.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=773266"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.alphaseek.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=773266"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.alphaseek.cn\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=773266"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}