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021nm\u6280\u672f\u5b9e\u529b\u5206\u6790<\/strong><\/h2>\n

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\u5f53\u524d2nm\u8282\u70b9\u666e\u904d\u91c7\u7528GAA\uff08Gate-All-Around\uff0c\u73af\u7ed5\u6805\u6781\uff09\u7eb3\u7c73\u7247\u6676\u4f53\u7ba1\uff0c\u4f461nm\u8282\u70b9\u9700\u8981\u66f4\u6fc0\u8fdb\u7684\u67b6\u6784\u3002IMEC\u7684\u8def\u7ebf\u56fe\u663e\u793a\uff0c\u4ece2nm\u5230A7\uff080.7nm\uff09\u8282\u70b9\u5c06\u91c7\u7528Forksheet\uff08\u53c9\u7247\uff09\u8bbe\u8ba1\uff0c\u968f\u540e\u5728A5\u548cA2\u8282\u70b9\u5f15\u5165CFET\uff08Complementary FET\uff0c\u4e92\u8865\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff09\u3002<\/p>\n

\u4e09\u661f\u5df2\u660e\u786e\u5c06\u57281nm\u8282\u70b9\u91c7\u7528Forksheet\u7ed3\u6784——\u8fd9\u662fGAA\u7eb3\u7c73\u7247\u7684\u8fdb\u5316\u7248\uff0c\u5728\u6807\u51c6GAA\u57fa\u7840\u4e0a\u65b0\u589e\u4ecb\u8d28\u58c1\uff0c\u53ef\u8fdb\u4e00\u6b65\u63d0\u5347\u6676\u4f53\u7ba1\u5bc6\u5ea6\u4e0e\u6027\u80fd\u3002\u53f0\u79ef\u7535\u57281nm\u5236\u7a0b\u4e2d\u53ef\u80fd\u4e0d\u4f1a\u7acb\u5373\u91c7\u7528CFET\uff0c\u800c\u662f\u7ee7\u7eed\u4f18\u5316GAA\u67b6\u6784\u3002<\/p>\n

\n

\"\u6676\u5706\u4ee3\u5de5\uff0c\u89d2\u90101nm\"<\/p>\n<\/div>\n

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031nm\u5e02\u573a\u6f5c\u529b<\/strong><\/h2>\n

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