\u94dc<\/a>\u8981\u9876\u4e0d\u4f4f\u4e86<\/strong>\u3002<\/p>\n\u6211\u4eec\u521d\u4e2d\u7269\u7406\u8bfe\u4e0a\u90fd\u5b66\u8fc7\uff0c\u5728\u6750\u6599\u3001\u957f\u5ea6\u548c\u6e29\u5ea6\u4e00\u5b9a\u65f6\uff0c\u5bfc\u7ebf\u7684\u7535\u963b\u4e0e\u6a2a\u622a\u9762\u79ef\u6210\u53cd\u6bd4\uff0c\u7b80\u5355\u6765\u8bf4\u5c31\u662f\u5bfc\u7ebf\u8d8a\u7ec6\uff0c\u7535\u963b\u8d8a\u5927\u3002<\/p>\n
![\"\u8001\u7f8e\u4e00\u4e2a\u4f1a](\"https:\/\/tech.ifeng.com\/c\/data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABAQMAAAAl21bKAAAAA1BMVEXy8vJkA4prAAAACklEQVQI12NgAAAAAgAB4iG8MwAAAABJRU5ErkJggg==\")
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\u8fd8\u662f\u7528\u7ecf\u5178\u7684\u9ad8\u901f\u516c\u8def\u4f8b\u5b50\u7ed9\u5927\u5bb6\u89e3\u91ca\uff0c\u539f\u672c\u5bbd\u9614\uff08 \u5bfc\u7ebf\u7c97 \uff09\u7684\u8def\u4e0a\u516d\u4e03\u8f86\u8f66\uff08 \u7535\u5b50 \uff09 \u968f\u4fbf\u8dd1\uff0c\u4f46\u4e00\u65e6\u8def\u53d8\u7a84\uff08 \u5bfc\u7ebf\u7ec6 \uff09\u4e86\uff0c\u8f66\uff08 \u7535\u5b50 \uff09 \u5c31\u8dd1\u4e0d\u52a8\u4e86\u3002<\/p>\n
<\/p>\n
\u6240\u4ee5\u82af\u7247\u94dc\u4e92\u8fde\u6750\u6599\u4e5f\u662f\u5982\u6b64\uff0c\u5236\u7a0b\u8d8a\u5148\u8fdb\u7535\u963b\u8d8a\u9ad8\uff0c\u800c\u4e14\u94dc\u5230\u4e86\u7eb3\u7c73\u7ea7\u522b\u4e4b\u540e\uff0c\u7535\u5b50\u5728\u72ed\u7a84\u7684\u7a7a\u95f4\u91cc\u52a8\u4e0d\u52a8\u5c31\u4f1a\u649e\u5230\u8fb9\u754c\u3001\u62d0\u5f2f\u3001\u51cf\u901f\uff0c\u7535\u963b\u4f1a\u4e0a\u5347\u5f97\u6bd4\u60f3\u8c61\u4e2d\u5feb\u5f97\u591a\u3002<\/p>\n
\u8fd9\u6837\u4e00\u6765\u4fe1\u53f7\u4f20\u8f93\u6162\u5982\u8717\u725b\uff0c\u529f\u8017\u8fd8\u4f1a\u7206\u70b8\u3002<\/p>\n
\u4e8e\u662f\u4e4e\uff0c\u5728\u8fd1\u51e0\u5e74\u7684 IEDM \u5927\u4f1a\u4e0a\uff0c\u7535\u5b50\u884c\u4e1a\u7684\u5927\u4f6c\u4eec\u5df2\u7ecf\u5f00\u59cb\u8ba8\u8bba\u7528\u948c\u91d1\u5c5e \uff08 Ru \uff09 \u53bb\u4ee3\u66ff\u73b0\u6709\u7684\u94dc\u4f5c\u4e3a\u4e92\u8fde\u6750\u6599\uff0c\u800c\u8fd9\u56de\u5927\u5bb6\u53c8\u56f4\u7ed5\u7740\u948c\u91d1\u5c5e\u63d0\u51fa\u4e86\u5f88\u591a\u65b0\u7684\u8def\u5b50\u3002<\/p>\n
\u948c\u5355\u8d28\u957f\u8fd9\u6837<\/p>\n
<\/p>\n
\u5148\u7ed9\u5927\u5bb6\u89e3\u91ca\u4e00\u4e0b\uff0c\u4e3a\u5565\u5927\u5bb6\u90fd\u770b\u4e0a\u4e86\u948c\u91d1\u5c5e\u5462\uff1f\u9996\u5148\u662f\u56e0\u4e3a\u5728\u6781\u7ec6\u7684\u7ebf\u5bbd\u4e0b\uff0c\u948c\u7684\u7535\u963b\u5bf9 \u201c \u53d8\u7ec6 \u201d \u8fd9\u4ef6\u4e8b\u513f\u6ca1\u90a3\u4e48\u654f\u611f\uff0c\u6bd4\u94dc\u66f4\u9002\u5408\u505a\u7ec6\u3002<\/p>\n
\u5176\u6b21\u662f\uff0c\u948c\u7279\u522b\u9002\u5408\u4e00\u79cd\u53eb ALD\uff08 \u539f\u5b50\u5c42\u6c89\u79ef \uff09 \u7684\u5de5\u827a\u3002\u548c\u4f20\u7edf\u94dc\u4e92\u8fde\u9760 \u201c \u5f80\u91cc\u704c\u518d\u522e\u5e73 \u201d \u7684\u7535\u9540\u5de5\u827a\u4e0d\u540c\uff0cALD \u5de5\u827a\u662f\u4e00\u5c42\u4e00\u5c42\u5730\u8d34\uff0c\u54ea\u6015\u5bfc\u7535\u6c9f\u69fd\u6781\u5ea6\u7a84\u548c\u6df1\uff0c\u4e5f\u80fd\u628a\u948c\u5747\u5300\u94fa\u597d\u3002<\/p>\n
\u6700\u91cd\u8981\u7684\u4e00\u70b9\u662f\uff0c\u8fd9\u79cd\u5de5\u827a\u8fd8\u80fd\u8ba9\u948c\u5185\u90e8\u7684 \u201c \u6676\u7c92\u6392\u5217 \u201d \u66f4\u6574\u9f50\uff0c\u7535\u5b50\u8dd1\u8d77\u6765\u4e0d\u5bb9\u6613\u88ab\u53cd\u590d\u6253\u65ad \u2014\u2014<\/p>\n
\u5c31\u597d\u6bd4\u628a\u539f\u672c\u5751\u5751\u6d3c\u6d3c\u3001\u5c94\u8def\u5f88\u591a\u7684\u571f\u8def\uff0c\u5347\u7ea7\u6210\u4e86\u5e73\u6574\u7684\u67cf\u6cb9\u8def\uff0c\u7535\u963b\u81ea\u7136\u4e5f\u5c31\u964d\u4e0b\u6765\u4e86\u3002<\/p>\n
\u8fd9\u4e0d\u5728 IEDM 2025 \u4f1a\u4e0a\uff0c\u6765\u81ea\u4e09\u661f\u7684\u5b9e\u9a8c\u7ed3\u679c\u8868\u660e\uff0c\u5728\u6a2a\u622a\u9762\u79ef\u53ea\u6709 300 nm² \u7684\u8d85\u7ec6\u4e92\u8fde\u7ebf\u4e2d\uff0c\u91c7\u7528\u8fd9\u79cd\u5de5\u827a\u5236\u9020\u7684\u948c\u7ebf\u76f8\u6bd4\u6e85\u5c04\u5de5\u827a\u7684\u948c\u7ebf\u7535\u963b\u964d\u4f4e\u4e86 46%\u3002<\/p>\n
<\/p>\n
\u800c\u4e14\u8fd9\u6b21 imec \uff08 \u6bd4\u5229\u65f6\u5fae\u7535\u5b50\u7814\u7a76\u4e2d\u5fc3 \uff09 \u8fd8\u5c55\u793a\u4e86\u5728 16 nm \u95f4\u8ddd\u4e0b\uff08 \u53ef\u7528\u4e8e A7 \uff0c\u5373 0.7 nm \u4ee5\u4e0b\u5de5\u827a \uff09\u5b9e\u73b0\u7684\u4e24\u5c42\u948c\u4e92\u8fde\u7ed3\u6784\uff0c\u5e76\u5728 300 mm \u6676\u5706\u4e0a\u53d6\u5f97\u4e86 95% \u4ee5\u4e0a\u7684\u826f\u7387\uff0c\u8fd9\u4e5f\u8bf4\u660e\u4e86\u948c\u4e92\u8054\u53ef\u80fd\u771f\u7684\u8981\u6765\u4e86\u3002<\/p>\n
\u89e3\u51b3\u4e86\u4e92\u8fde\u6750\u6599\u4e4b\u540e\u5c31\u4e07\u4e8b\u5927\u5409\u4e86\u4e48\uff1fnonono\uff0c\u8def\u4fee\u597d\u4e86\uff0c \u201c \u8f66 \u201d \u4e5f\u5f97\u542c\u6307\u6325\u624d\u884c \u2014\u2014<\/p>\n
\u5927\u5bb6\u90fd\u77e5\u9053\uff0c\u82af\u7247\u6700\u5e95\u5c42\u7684\u903b\u8f91\u5176\u5b9e\u5c31\u4e24\u79cd\u72b6\u6001 \u2014\u2014 \u901a\u7535\uff0c\u6216\u8005\u4e0d\u901a\u7535\u3002<\/p>\n
\u6676\u4f53\u7ba1\u901a\u8fc7\u6805\u6781 \uff08 \u95e8 \uff09\u6765\u63a7\u5236\u7535\u6d41\u7684\u5f00\u4e0e\u5173 \uff08 1 \u548c 0 \uff09\u3002\u4f46\u95ee\u9898\u662f\u5f53\u6676\u4f53\u7ba1\u5c0f\u5230\u4e00\u5b9a\u7a0b\u5ea6\u7684\u65f6\u5019\uff0c\u7535\u5b50\u5c31\u5f00\u59cb\u80e1\u6765\u4e86\uff0c\u5373\u4fbf\u662f\u95e8\u5173\u4e0a\u4e86\uff0c\u8fd8\u662f\u4f1a\u6709\u7535\u5b50\u5077\u6e9c\u8fc7\u53bb\u3002<\/p>\n
<\/p>\n
\u7535\u5b50\u8fd9\u6837\u53db\u9006\u7684\u540e\u679c\u662f\uff0c\u6f0f\u7535\u4e0a\u5347\u3001\u9759\u6001\u529f\u8017\u98d9\u5347\u3001\u82af\u7247\u53d1\u70ed\u53d8\u4e25\u91cd\uff0c\u4e3a\u4e86\u6e29\u5ea6\u53ea\u80fd\u964d\u9891\u3001\u9650\u529f\u8017\uff0c\u6027\u80fd\u63d0\u5347\u53cd\u5012\u529f\u8017\u5899\u5361\u4f4f\u4e86\uff0c\u5408\u7740\u4e00\u6765\u4e8c\u53bb\u767d\u5fd9\u6d3b\u3002<\/p>\n
\u6240\u4ee5\u8bf4 IEDM \u4e0a\u63d0\u5230\u7684\u53e6\u4e00\u4e2a\u91cd\u8981\u8bae\u9898\uff0c\u5c31\u662f\u7528\u4e8c\u7ef4\u8fc7\u6e21\u91d1\u5c5e\u786b\u5316\u7269\uff08 2D TMDs \uff09\u53bb\u66ff\u4ee3\u539f\u672c\u7845\u7684\u6c9f\u9053\u6750\u6599\u3002<\/p>\n
\u6258\u5c3c\u7ed9\u5927\u4f19\u7b80\u5355\u89e3\u91ca\u4e00\u4e0b\uff1a\u4ee5\u5f80\u7684\u7845\u6c9f\u9053\uff0c\u56e0\u4e3a\u6c9f\u9053\u5b83\u6bd4\u8f83\u539a\uff0c\u6b63\u6240\u8c13\u5929\u9ad8\u7687\u5e1d\u8fdc\uff0c\u6805\u6781 \uff08 \u95e8 \uff09\u4ece\u4e0a\u9762\u6307\u6325\uff0c\u8fdc\u7aef\u7684\u8def\u901a\u4e0d\u901a\u5b83\u5c31\u7ba1\u4e0d\u4f4f\u4e86\uff0c\u8fd9\u5e95\u4e0b\u5c31\u5bb9\u6613\u6f0f\u7535\u3002<\/p>\n
\u800c\u4ee5\u786b\u5316\u94bc MoS\u2082\u3001\u7852\u5316\u94a8 WSe\u2082 \u4e3a\u4ee3\u8868\u7684 2D TMDs \u6750\u6599\uff0c\u539a\u5ea6\u53ea\u6709\u51e0\u5c42\u539f\u5b50\u539a\uff0c\u6805\u6781\u63a7\u5236\u8d77\u7535\u5b50\u5c31\u624b\u62ff\u628a\u6390\u3002<\/p>\n
<\/p>\n
\u4e0d\u8fc7\u8bdd\u8bf4\u56de\u6765\uff0c 2D TMDs \u76f8\u6bd4\u948c\u4e92\u8054\u6765\u8bb2\u8fd8\u662f\u6709\u70b9\u9065\u8fdc\uff0c\u76ee\u524d\u66f4\u591a\u7684\u8fd8\u662f\u5728\u539f\u578b\u7814\u7a76\u9636\u6bb5\u3002<\/p>\n
\u56e0\u4e3a 2D TMDs \u6750\u6599\u7684\u751f\u957f\u5de5\u827a\u5bb9\u6613\u628a\u6805\u6781\u641e\u574f\uff0c\u8fc7\u4e8e\u8584\u7684\u6750\u6599\u540e\u7eed\u4e5f\u66f4\u5bb9\u6613\u7fd8\u8fb9\uff0c\u8fd8\u5f97\u89e3\u51b3\u4f4e\u963b\u63a5\u89e6\u7b49\u7b49\u95ee\u9898\uff0c\u540e\u9762\u8981\u5927\u89c4\u6a21\u91cf\u4ea7\u8fd8\u5f97\u518d\u6c89\u6dc0\u6c89\u6dc0\u3002<\/p>\n
\u9664\u4e86\u4ee5\u4e0a\u8fd9\u4e24\u4e2a\u6bd4\u8f83\u65b0\u9896\u7684\u77e5\u8bc6\uff0cIEDM \u8fd8\u804a\u4e86\u4e00\u4e9b\u8001\u751f\u5e38\u8c08\u7684\u8bdd\u9898\uff0c\u6bd4\u5982\u65b0\u7684\u6805\u6781\u5806\u53e0\u65b9\u5f0f\uff0c\u4e5f\u5c31\u662f\u95e8\u7ed3\u6784\u3002<\/p>\n
\u8fd9\u4e2a\u5927\u5bb6\u53ef\u80fd\u6bd4\u8f83\u719f\u6089\u4e86\uff0c\u8fc7\u53bb\u7684\u5341\u51e0\u5e74\u91cc\u6211\u4eec\u4ece FinFET \uff08 \u9ccd\u5f0f\u573a\u6548\u5e94\u6676\u4f53\u7ba1 \uff09\u5230 2nm \u5de5\u827a\u7684\u4e3b\u6d41\u7ed3\u6784 GAA\uff08 \u73af\u7ed5\u6805\u6781 \uff09\uff0c\u6676\u4f53\u7ba1\u5bc6\u5ea6\u4e0d\u65ad\u63d0\u9ad8\u3002<\/p>\n
<\/p>\n
\u4f46\u5728\u6700\u8fd1\u51e0\u5e74\u7684 IEDM \u4e0a\uff0c\u4e00\u4e2a\u88ab\u8d8a\u6765\u8d8a\u9891\u7e41\u63d0\u8d77\u7684\u65b0\u65b9\u5411\u5c31\u662f\u53f0\u79ef\u7535\u7b49\u5de8\u5934\u53cd\u590d\u62bc\u6ce8\u7684 CFET\uff08\u4e92\u8865\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff09\u3002<\/p>\n
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\u4f46\u662f\u5177\u4f53\u7684\u6211\u4eec\u4eca\u5929\u5c31\u4e0d\u8bb2\u4e86\uff0c\u611f\u5174\u8da3\u7684\u5c0f\u4f19\u4f34\u53ef\u4ee5\u81ea\u5df1\u641c\u641c\u770b\uff0c\u6bd5\u7adf AI \u5de5\u5177\u73b0\u5728\u90fd\u8fd9\u4e48\u597d\u7528\u4e86 \uff08 doge \uff09\u3002<\/p>\n
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\u5728\u6bcf\u5e74\u7684\u4f1a\u8bae\u91cc\uff0c\u6709\u4eba\u7814\u7a76\u6750\u6599\uff0c\u6709\u4eba\u7814\u7a76\u5de5\u827a\uff0c\u4e5f\u6709\u4eba\u53cd\u590d\u63a8\u7ffb\u81ea\u5df1\u524d\u9762\u7684\u7ed3\u8bba\uff0c\u518d\u4ece\u5934\u6765\u8fc7\u3002\u6bcf\u4e00\u7bc7\u8bba\u6587\u80cc\u540e\uff0c\u90fd\u6709\u65e0\u6570\u6b21\u5931\u8d25\u3001\u4e89\u8bba\u548c\u63a8\u5012\u91cd\u6765\uff0c\u51dd\u805a\u7740\u5de5\u7a0b\u5e08\u4eec\u7684\u5fc3\u8840\u3002<\/p>\n
\u800c\u4ece\u66f4\u5927\u7684\u89c6\u89d2\u6765\u770b\uff0c\u5fae\u7535\u5b50\u884c\u4e1a\u672c\u8eab\uff0c\u5c31\u662f\u4eba\u7c7b\u4e0d\u65ad\u903c\u8fd1\u6781\u9650\u3001\u53c8\u4e0d\u65ad\u6362\u8def\u524d\u884c\u7684\u7f29\u5f71\u3002\u4e5f\u8bb8\u5927\u591a\u6570\u540d\u5b57\u4e0d\u4f1a\u88ab\u8bb0\u4f4f\uff0c\u4f46\u6b63\u662f\u8fd9\u7fa4\u4eba\u4e00\u6b21\u6b21\u7684\u5934\u8111\u98ce\u66b4\uff0c\u624d\u8ba9\u6574\u4e2a\u4e16\u754c\u4e00\u70b9\u70b9\u5411\u524d\u63a8\u8fdb\u3002<\/p>\n
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![\"\u8001\u7f8e\u4e00\u4e2a\u4f1a](\"https:\/\/x0.ifengimg.com\/ucms\/2026_10\/5501CF5F3AE48FE104CC166B833D7C52EDAFEBD6_size197_w686_h386.png\")
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