{"id":724818,"date":"2026-02-15T18:55:25","date_gmt":"2026-02-15T10:55:25","guid":{"rendered":"https:\/\/www.alphaseek.cn\/?p=724818"},"modified":"2026-02-15T18:55:25","modified_gmt":"2026-02-15T10:55:25","slug":"%e6%99%b6%e5%9c%86%e5%8e%82%e7%96%af%e5%bb%ba%ef%bc%8c%e5%85%89%e5%88%bb%e6%9c%ba%e5%8d%b4%e5%8d%96%e4%b8%8d%e5%8a%a8%e4%ba%86","status":"publish","type":"post","link":"https:\/\/www.alphaseek.cn\/?p=724818","title":{"rendered":"\u6676\u5706\u5382\u75af\u5efa\uff0c\u5149\u523b\u673a\u5374\u5356\u4e0d\u52a8\u4e86"},"content":{"rendered":"<div>\n<blockquote>\n<p>\u6587 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class=\"tag_link\">\u65e5\u672c<\/a>\u4f73\u80fd\u3001\u65e5\u672c\u5c3c\u5eb7\u4e09\u5bb6\uff1b\u56fd\u5185\u867d\u6709\u90e8\u5206\u4f01\u4e1a\u5b9e\u73b0\u4e86\u5149\u523b\u673a\u7684\u5c0f\u6279\u91cf\u51fa\u8d27\uff0c\u4f46\u56e0\u5c1a\u672a\u5f62\u6210\u89c4\u6a21\u5316\u91cf\u4ea7\u89c4\u6a21\uff0c\u6682\u672a\u7eb3\u5165\u672c\u6b21\u4e3b\u6d41\u5e02\u573a\u7684\u7edf\u8ba1\u8303\u7574\u3002<\/p>\n<h2><strong>\u5149\u523b\u673a\u4e09\u5de8\u5934\uff0c\u51fa\u8d27\u51e0\u4f55\uff1f<\/strong><\/h2>\n<p><strong>ASML\uff0c\u51fa\u8d27\u7ea6327\u53f0<\/strong><\/p>\n<div>\n<p><img loading=\"lazy\" src=\"https:\/\/images.tmtpost.com\/uploads\/images\/2026\/02\/15\/83d7d362e7c4b8106de64c5725817e7f_1771126687.jpeg?imageMogr2\/auto-orient\/strip\/interlace\/1\/quality\/85\/thumbnail\/720x739\/gravity\/center\/crop\/!720x739&ext=.jpeg\" width=\"804\" height=\"826\" alt=\"\u6676\u5706\u5382\u75af\u5efa\uff0c\u5149\u523b\u673a\u5374\u5356\u4e0d\u52a8\u4e86\" style=\"display:block; 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class=\"tag_link\">\u4e1a\u7ee9<\/a>\u62a5\u544a\uff0c\u7b2c\u56db\u5b63\u5ea6\u65b0\u552e\u51fa\u5149\u523b\u7cfb\u7edf94\u53f0\u3001\u4e8c\u624b\u7cfb\u7edf8\u53f0\uff1b\u5168\u5e74\u65b0\u5149\u523b\u7cfb\u7edf300\u53f0\u3001\u4e8c\u624b\u7cfb\u7edf27\u53f0\uff0c\u76f8\u6bd42024\u5e74\u7684380\u53f0\u65b0\u7cfb\u7edf\u300138\u53f0\u4e8c\u624b\u7cfb\u7edf\uff0c\u51fa\u8d27\u603b\u91cf\u660e\u663e\u4e0b\u6ed1\u3002<\/p>\n<p>\u5206\u673a\u578b\u6765\u770b\uff0cEUV\u5149\u523b\u7cfb\u7edf\u8868\u73b0\u4eae\u773c\uff0c\u9500\u552e\u989d\u540c\u6bd4\u589e\u957f39%\u81f3116\u4ebf\u6b27\u5143\uff0c<strong>\u5bf9\u5e94\u786e\u8ba448\u53f0\u6536\u5165\uff0c<\/strong>\u9996\u53f0EXE:5200B\u7cfb\u7edf\u5b8c\u6210\u73b0\u573a\u9a8c\u6536\u5e76\u5165\u8d26\uff1bDUV\u5149\u523b\u7cfb\u7edf\u5219\u6709\u6240\u627f\u538b\uff0c\u9500\u552e\u989d\u540c\u6bd4\u4e0b\u964d6%\u81f3120\u4ebf\u6b27\u5143\uff0c<strong>\u786e\u8ba4279\u53f0\u6536\u5165<\/strong>\uff0c\u9996\u6b3e\u9762\u54113D\u96c6\u6210\u5e02\u573a\u7684XT:260\u7cfb\u7edf\u5df2\u4ea4\u4ed8\u5e76\u786e\u8ba4\u6536\u5165\u3002\u4e24\u8005\u5408\u8ba1<strong>\uff0c2025\u5e74ASML\u5df2\u786e\u8ba4\u6536\u5165\u7684\u5149\u523b\u673a\u7ea6327\u53f0\uff0c<\/strong>\u8f832023\u5e74\u30012024\u5e74\u663e\u8457\u56de\u843d\u3002<\/p>\n<p>\u4e2d\u56fd\u5e02\u573a\u4ecd\u662fASML\u7684\u91cd\u8981\u652f\u6491\uff0c2025\u5e74\u5360\u5176\u51c0\u7cfb\u7edf\u9500\u552e\u989d\u768433%\uff0c\u4f4d\u5c45\u5168\u7403\u9996\u4f4d\uff0c\u4f46\u8fd9\u4e00\u6bd4\u4f8b\u8f832024\u5e74\u768441%\u6709\u6240\u4e0b\u964d\u3002\u4e3a\u6ee1\u8db3\u4e2d\u56fd\u5185\u5b58\u5382\u5546\u7684\u9700\u6c42\uff0cASML\u8ba1\u52122026\u5e74\u7b2c\u56db\u5b63\u5ea6\u63a8\u51fa\u65b0\u6b3e\u6d78\u6da6\u5f0fDUV 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class=\"tag_link\">\u7f8e\u56fd<\/a>\u51fa\u53e3\u89c4\u8303\uff0c\u53c8\u80fd\u9002\u914d\u4e2d\u56fd\u5185\u5b58\u4f01\u4e1a\u7684\u9700\u6c42\uff0c\u6709\u671b\u4e3a2026\u5e74\u56db\u5b63\u5ea6\u53ca2027\u5e74\u4e1a\u7ee9\u63d0\u4f9b\u52a9\u529b\u3002<\/p>\n<p>\u5c55\u671b\u672a\u6765\uff0c\u4f9d\u636e\u8521\u53f8\u534a\u5bfc\u4f53\u7684\u6269\u4ea7\u89c4\u5212\uff0cASML\u9884\u8ba12027\u5e74EUV\u51fa\u8d27\u91cf\u5c06\u8fbe80-85\u53f0\uff0cDUV\u51fa\u8d27\u91cf\u5c06\u8fbe380-400\u53f0\uff0c\u91cd\u56de\u589e\u957f\u8f68\u9053\u3002<\/p>\n<p><strong>\u5c3c\u5eb7+\u4f73\u80fd\uff1a\u5408\u8ba1\u51fa\u8d27\u7ea6318\u53f0<\/strong><\/p>\n<p>\u5c3c\u5eb7\u4e0e\u4f73\u80fd\u6682\u672a\u516c\u5e032025\u5e74\u5149\u523b\u673a\u51c6\u786e\u51fa\u8d27\u6570\u636e\uff0c\u4f46\u4ece\u4e24\u5bb6\u8d22\u62a5\u9884\u6d4b\u4e2d\u53ef\u5927\u81f4\u63a8\u7b97\u3002\u5176\u4e2d\uff0c\u5c3c\u5eb72025\u5e744-9\u6708\u534a\u5bfc\u4f53\u5149\u523b\u673a\u9500\u91cf\u4e3a9\u53f0\uff0c\u4f4e\u4e8e\u53bb\u5e74\u540c\u671f\u768410\u53f0\uff1b\u540c\u65f6\uff0c<strong>\u5c3c\u5eb7\u5c06\u672c\u5e74\u5ea6\u9500\u91cf\u76ee\u6807\u4ece\u4e0a\u8c03\u524d\u768434\u53f0\u4e0b\u4fee\u81f329\u53f0<\/strong>\uff0c\u7565\u9ad8\u4e8e2024\u5e74\u768428\u53f0\u3002<\/p>\n<p>\u4f73\u80fd\u7684\u8868\u73b0\u76f8\u5bf9\u7a33\u5065\uff0c2025\u5e74\u4e00\u5b63\u5ea6\u534a\u5bfc\u4f53\u5149\u523b\u8bbe\u5907\u9500\u91cf56\u53f0\uff0c\u540c\u6bd4\u589e\u52a07\u53f0\uff1b\u5c3d\u7ba1\u5c06\u672c\u5e74\u5ea6\u9500\u91cf\u76ee\u6807\u4ece308\u53f0\u4e0b\u8c03\u81f3289\u53f0\uff0c\u4f46\u76f8\u8f83\u4e8e2024\u5e74\u7684233\u53f0\uff0c\u4ecd\u80fd\u5b9e\u73b024%\u7684\u540c\u6bd4\u589e\u957f\u3002<\/p>\n<p>\u7efc\u5408\u4e24\u5bb6\u76ee\u6807\u63a8\u7b97\uff0c2025\u5e74\u5c3c\u5eb7\u4e0e\u4f73\u80fd\u5408\u8ba1\u51fa\u8d27\u91cf\u7ea6\u4e3a318\u53f0\u3002<\/p>\n<p>\u636e\u6b64\u8ba1\u7b97\uff0c<strong>2025\u5e74\u5168\u7403\u4e09\u5927\u5149\u523b\u9f99\u5934\u7684\u5149\u523b\u673a\u603b\u51fa\u8d27\u91cf\u7ea6\u4e3a645\u53f0\u3002<\/strong><\/p>\n<h2><strong>\u4e2d\u56fd\u5149\u523b\u673a\u8fdb\u53e3\u6570\uff0c\u4e0b\u6ed1\uff01<\/strong><\/h2>\n<p>\u4f2f\u6069\u65af\u5766\u6839\u636e\u4e2d\u56fd\u6d77\u5173\u516c\u5f00\u6570\u636e\uff0c\u5bf92025\u5e74\u4e2d\u56fd\u534a\u5bfc\u4f53\u6676\u5706\u5236\u9020\u8bbe\u5907\uff08WFE\uff09\u8fdb\u53e3\u60c5\u51b5\u8fdb\u884c\u4e86\u56de\u6eaf\u5206\u6790\u3002\u7ed3\u679c\u663e\u793a\uff0c2025\u5e74\u4e2d\u56fd\u6676\u5706\u5236\u9020\u8bbe\u5907\u8fdb\u53e3\u603b\u989d\u8fbe391.66\u4ebf\u7f8e\u5143\uff0c\u540c\u6bd4\u589e\u957f3%\uff0c\u521b\u4e0b\u5386\u53f2\u65b0\u9ad8\uff1b\u5176\u4e2d12\u6708\u5355\u6708\u8fdb\u53e3\u989d45.08\u4ebf\u7f8e\u5143\uff0c\u73af\u6bd4\u589e\u957f84%\uff0c\u6210\u4e3a\u5168\u5e74\u8fdb\u53e3\u5cf0\u503c\u3002<\/p>\n<p>\u5149\u523b\u673a\u8fdb\u53e3\u65b9\u9762\uff0c2025\u5e74\u5168\u5e74\u8fdb\u53e3\u989d\u4e0e2024\u5e74\u57fa\u672c\u6301\u5e73\uff0c\u4ec5\u540c\u6bd4\u4e0b\u6ed11%\uff0c\u4f4612\u6708\u5149\u523b\u673a\u8fdb\u53e3\u989d\u8fbe23\u4ebf\u7f8e\u5143\uff0c\u521b\u4e0b\u6708\u5ea6\u5386\u53f2\u7eaa\u5f55\u3002\uff08\u76f8\u5173\u8fdb\u53e3\u6307\u6807\u5305\u62ec\uff1a\u6c89\u79ef\u3001\u5e72\u6cd5\u523b\u8680\u3001\u5149\u523b\u673a\u3001\u8fc7\u7a0b\u63a7\u5236\u7cfb\u7edf\u3001\u6750\u6599\u53bb\u9664\u4e0e\u6e05\u6d01\u3001\u5176\u4ed6\uff0c\u4ee5\u53ca\u5bf9\u5e94\u603b\u989d\u548c\u4e0d\u542b\u5149\u523b\u7684\u603b\u989d\uff09<\/p>\n<div>\n<p><img loading=\"lazy\" src=\"https:\/\/images.tmtpost.com\/uploads\/images\/2026\/02\/15\/d213a4d045eaa50b520d17b58f81ce31_1771126687.jpeg?imageMogr2\/auto-orient\/strip\/interlace\/1\/quality\/85\/thumbnail\/720x382\/gravity\/center\/crop\/!720x382&ext=.jpeg\" width=\"1080\" height=\"574\" alt=\"\u6676\u5706\u5382\u75af\u5efa\uff0c\u5149\u523b\u673a\u5374\u5356\u4e0d\u52a8\u4e86\" style=\"display:block; margin-left:auto; margin-right:auto\" \/><\/p>\n<\/p>\n<p><img loading=\"lazy\" src=\"https:\/\/images.tmtpost.com\/uploads\/images\/2026\/02\/15\/0fc0c09dfb71cdaefe687aa13bb41b73_1771126688.jpeg?imageMogr2\/auto-orient\/strip\/interlace\/1\/quality\/85\/thumbnail\/720x278\/gravity\/center\/crop\/!720x278&ext=.jpeg\" width=\"1080\" height=\"418\" alt=\"\u6676\u5706\u5382\u75af\u5efa\uff0c\u5149\u523b\u673a\u5374\u5356\u4e0d\u52a8\u4e86\" style=\"display:block; margin-left:auto; margin-right:auto\" \/><\/p>\n<\/div>\n<p>\u53d7\u7f8e\u56fd\u51fa\u53e3\u9650\u5236\u5f71\u54cd\uff0cASML\u9884\u8ba1\uff0c<strong>2026\u5e74\u4e2d\u56fd\u5360\u9500\u552e\u989d\u7684\u6bd4\u4f8b\u5c06\u964d\u81f320%\u3002<\/strong><\/p>\n<p>DUV \u662f\u56fd\u5185\u5149\u523b\u673a\u7684\u4e3b\u8981\u8fdb\u53e3\u54c1\u7c7b\u3002\u4e00\u65b9\u9762\uff0c\u56fd\u5185\u534a\u5bfc\u4f53\u4ea7\u4e1a\u6b63\u5904\u4e8e\u6210\u719f\u5236\u7a0b\u6269\u4ea7\u3001\u7279\u8272\u5de5\u827a\u7a81\u7834\u7684\u5173\u952e\u9636\u6bb5\uff0cDUV \u7684\u6280\u672f\u7279\u6027\u53ef\u8986\u76d6 7nm \u53ca\u4ee5\u4e0a\u7edd\u5927\u591a\u6570\u5236\u7a0b\u9700\u6c42\uff0c\u4e0e\u4ea7\u4e1a\u73b0\u9636\u6bb5\u53d1\u5c55\u8282\u594f\u9ad8\u5ea6\u5339\u914d\uff1b\u53e6\u4e00\u65b9\u9762\uff0cEUV \u53d7\u7f8e\u56fd\u6280\u672f\u7ba1\u63a7\u65e0\u6cd5\u6b63\u5e38\u8fdb\u53e3\uff0c\u56fd\u5185\u4f01\u4e1a\u53ea\u80fd\u901a\u8fc7\u52a0\u5927 DUV 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NAND\u7684\u5806\u53e0\u5c42\u6570\u63d0\u5347\u3001DDR\u5185\u5b58\u7684\u5236\u7a0b\u4f18\u5316\uff0c\u5747\u9ad8\u5ea6\u4f9d\u8d56DUV\u5149\u523b\u673a&mdash;&mdash;\u5c24\u5176\u662fASML\u7684ArF\u6d78\u6ca1\u5f0fDUV\uff0c\u53ef\u901a\u8fc7\u591a\u91cd\u66dd\u5149\u6280\u672f\u5b9e\u73b0\u66f4\u9ad8\u7684\u56fe\u5f62\u7cbe\u5ea6\uff0c\u652f\u6491\u56fd\u51853D NAND\u5806\u53e0\u5c42\u6570\u5411500\u5c42\u4ee5\u4e0a\u7a81\u7834\uff0c\u540c\u65f6\u964d\u4f4e\u5b58\u50a8\u82af\u7247\u7684\u5355\u4f4d\u6210\u672c\u3002<\/p>\n<p><strong>\u5176\u4e8c\uff0c\u6210\u719f\u5236\u7a0b\u903b\u8f91\u82af\u7247\u751f\u4ea7\uff0c\u4e5f\u662fDUV\u8fdb\u53e3\u7684\u6838\u5fc3\u521a\u9700\u3002<\/strong>2025\u5e74\uff0c\u56fd\u5185\u4e3b\u6d41\u6676\u5706\u4ee3\u5de5\u4f01\u4e1a\u6301\u7eed\u6269\u4ea728nm\u300140nm\u7b49\u6210\u719f\u5236\u7a0b\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u6d88\u8d39\u7535\u5b50\u3001\u7269\u8054\u7f51\u3001<a href=\"https:\/\/www.alphaseek.cn\/?tag=%e6%b1%bd%e8%bd%a6\" title=\"View all posts in \u6c7d\u8f66\" target=\"_blank\" class=\"tag_link\">\u6c7d\u8f66<\/a>\u7535\u5b50\u7b49\u9886\u57df\uff0c\u800cDUV\u6b63\u662f\u8fd9\u7c7b\u5236\u7a0b\u7684\u6838\u5fc3\u5149\u523b\u8bbe\u5907\u3002\u5176\u4e2d\uff0cArF\u6d78\u6ca1\u5f0fDUV\u4e3b\u8981\u7528\u4e8e28nm\uff08HKC+\u5de5\u827a\uff09\u7684\u751f\u4ea7\uff0c\u53ef\u5b9e\u73b0\u9ad8\u7cbe\u5ea6\u56fe\u5f62\u66dd\u5149\uff0c\u4fdd\u969c\u82af\u7247\u6027\u80fd\uff1bKrF\u5e72\u6cd5DUV\u5219\u7528\u4e8e40nm\u53ca\u4ee5\u4e0a\u5236\u7a0b\uff0c\u517c\u987e\u751f\u4ea7\u6548\u7387\u4e0e\u6210\u672c\u63a7\u5236\u3002<\/p>\n<p><strong>\u5176\u4e09\uff0c\u7279\u8272\u5de5\u827a\u4e0e\u529f\u7387\u534a\u5bfc\u4f53\u5236\u9020\uff0c\u8fdb\u4e00\u6b65\u62d3\u5bbd\u4e86DUV\u7684\u5e94\u7528\u8fb9\u754c\u3002<\/strong>\u5728\u529f\u7387\u534a\u5bfc\u4f53\u9886\u57df\uff08\u5982IGBT\u3001MOSFET\uff09\uff0c\u56fd\u5185\u76f8\u5173\u4f01\u4e1a2025\u5e74\u52a0\u901f\u6269\u4ea7\uff0c\u8fd9\u7c7b\u82af\u7247\u5bf9\u5149\u523b\u7cbe\u5ea6\u7684\u8981\u6c42\u76f8\u5bf9\u8f83\u4f4e\uff0c\u5c3c\u5eb7\u3001\u4f73\u80fd\u7684KrF\u5e72\u6cd5DUV\u57fa\u672c\u53ef\u4ee5\u6ee1\u8db3\u9700\u6c42\uff0c\u7528\u4e8e\u529f\u7387\u82af\u7247\u7684\u57fa\u7247\u5149\u523b\u3001\u6805\u6781\u56fe\u5f62\u5236\u4f5c\u7b49\u73af\u8282\uff0c\u652f\u6491<a href=\"https:\/\/www.alphaseek.cn\/?tag=%e6%96%b0%e8%83%bd%e6%ba%90%e6%b1%bd%e8%bd%a6\" title=\"View all posts in \u65b0\u80fd\u6e90\u6c7d\u8f66\" target=\"_blank\" class=\"tag_link\">\u65b0\u80fd\u6e90\u6c7d\u8f66<\/a>\u3001\u5149\u4f0f\u3001\u50a8\u80fd\u7b49\u9886\u57df\u7684\u529f\u7387\u82af\u7247\u4f9b\u5e94\u3002\u6b64\u5916\uff0c\u5728\u5c04\u9891\u82af\u7247\u3001\u4f20\u611f\u5668\u7b49\u7279\u8272\u5de5\u827a\u9886\u57df\uff0cDUV\u53ef\u901a\u8fc7\u7075\u6d3b\u7684\u66dd\u5149\u65b9\u6848\uff0c\u9002\u914d\u4e0d\u540c\u82af\u7247\u7684\u7ed3\u6784\u9700\u6c42\uff0c\u5f25\u8865\u9ad8\u7aef\u5149\u523b\u8bbe\u5907\u7f3a\u5931\u7684\u77ed\u677f\u3002<\/p>\n<h2><strong>\u8c01\uff0c\u62e5\u6709\u6700\u591a\u7684\u5149\u523b\u673a\uff1f<\/strong><\/h2>\n<p>\u5728\u5148\u8fdb\u5236\u7a0b\u82af\u7247\u7684\u5236\u9020\u7248\u56fe\u4e0a\uff0cEUV\uff08\u6781\u7d2b\u5916\uff09\u5149\u523b\u673a\u65e9\u5df2\u4e0d\u662f &ldquo;\u53ef\u9009\u9879&rdquo;\uff0c\u800c\u662f\u51b3\u5b9a\u4ea7\u4e1a\u8bdd\u8bed\u6743\u7684 &ldquo;\u5165\u573a\u5238&rdquo;\u3002\u90a3\u4e48\uff0c\u8c01\u62e5\u6709\u6700\u591a\u7684\u5149\u523b\u673a\u5462\uff1f<\/p>\n<div>\n<p><img loading=\"lazy\" src=\"https:\/\/images.tmtpost.com\/uploads\/images\/2026\/02\/15\/b97206b5835af8312d62513803eb059d_1771126688.jpeg?imageMogr2\/auto-orient\/strip\/interlace\/1\/quality\/85\/thumbnail\/720x372\/gravity\/center\/crop\/!720x372&ext=.jpeg\" width=\"1080\" height=\"559\" alt=\"\u6676\u5706\u5382\u75af\u5efa\uff0c\u5149\u523b\u673a\u5374\u5356\u4e0d\u52a8\u4e86\" style=\"display:block; margin-left:auto; margin-right:auto\" \/><\/p>\n<\/div>\n<p>\u81ea ASML \u5728 2016 \u5e74\u6b63\u5f0f\u91cf\u4ea7 EUV \u5149\u523b\u673a\u4ee5\u6765\uff0c\u8fd9\u5341\u5e74\u95f4\u5168\u7403\u7d2f\u8ba1\u4ea4\u4ed8\u7684 EUV \u8bbe\u5907\u7ea6\u4e3a 309 \u53f0\u3002\u5176\u4e2d\uff0c\u53f0\u79ef\u7535\u72ec\u5360 157 \u53f0\uff0c\u5360\u6bd4\u9ad8\u8fbe50.8%&mdash;&mdash; \u5168\u7403\u4e00\u534a\u7684 EUV \u4ea7\u80fd\u90fd\u88ab\u8fd9\u5bb6\u4e2d\u56fd\u53f0\u6e7e\u4ee3\u5de5\u5382\u6536\u5165\u56ca\u4e2d\u3002\u7d27\u968f\u5176\u540e\u7684\u662f\u4e09\u661f\uff0c\u5176\u5de5\u5382\u5185\u90e8\u7f72\u4e86 76 \u53f0 EUV\uff1bIntel \u5219\u62e5\u6709 35 \u53f0\uff0cSK \u6d77\u529b\u58eb 29 \u53f0\uff0c\u7f8e\u5149 5 \u53f0\uff0c\u800c 2022 \u5e74\u624d\u6210\u7acb\u7684\u65e5\u672c Rapidus \u516c\u53f8\uff0c\u4e5f\u62ff\u5230\u4e86 1 \u53f0 EUV \u4f5c\u4e3a\u5148\u8fdb\u5236\u7a0b\u5e03\u5c40\u7684\u8d77\u70b9\u3002<\/p>\n<p><strong>\u53f0\u79ef\u7535 157 \u53f0 EUV<\/strong>\u7684\u4fdd\u6709\u91cf\uff0c\u7edd\u975e\u7b80\u5355\u7684 &ldquo;\u8bbe\u5907\u91c7\u8d2d&rdquo;\uff0c\u800c\u662f\u5176\u5728\u5148\u8fdb\u5236\u7a0b\u4ee3\u5de5\u9886\u57df\u6784\u5efa\u9738\u6743\u7684\u6838\u5fc3\u652f\u70b9\u3002\u4ece 2019 \u5e74\u9996\u6b21\u5728 N7 + \u5de5\u827a\u4e2d\u5f15\u5165 EUV \u5f00\u59cb\uff0c\u53f0\u79ef\u7535\u5c31\u5c06 EUV \u4e0e\u5ba2\u6237\u9700\u6c42\u6df1\u5ea6\u7ed1\u5b9a\uff1a<a href=\"https:\/\/www.alphaseek.cn\/?tag=%e8%8b%b9%e6%9e%9c\" title=\"View all posts in \u82f9\u679c\" target=\"_blank\" class=\"tag_link\">\u82f9\u679c<\/a> A \u7cfb\u5217\u3001<a href=\"https:\/\/www.alphaseek.cn\/?tag=%e9%ab%98%e9%80%9a\" title=\"View all posts in \u9ad8\u901a\" target=\"_blank\" class=\"tag_link\">\u9ad8\u901a<\/a>\u9a81\u9f99\u3001\u82f1\u4f1f\u8fbe GPU \u7b49\u9ad8\u7aef\u82af\u7247\u7684\u4ee3\u5de5\u8ba2\u5355\uff0c\u51e0\u4e4e\u5168\u90e8\u4f9d\u8d56\u53f0\u79ef\u7535\u7684 EUV \u4ea7\u80fd\u3002<\/p>\n<p><strong>\u4e09\u661f 76 \u53f0 EUV<\/strong>\u7684\u5e03\u5c40\uff0c\u6298\u5c04\u51fa\u5176\u5728\u534a\u5bfc\u4f53\u9886\u57df &ldquo;\u53cc\u7ebf\u4f5c\u6218&rdquo; \u7684\u6218\u7565\u56f0\u5883\uff1a\u4e00\u65b9\u9762\uff0c\u5728\u903b\u8f91\u82af\u7247\u4ee3\u5de5\u9886\u57df\u8ffd\u8d76\u53f0\u79ef\u7535\uff1b\u53e6\u4e00\u65b9\u9762\uff0c\u5728\u5b58\u50a8\u82af\u7247\u9886\u57df\u7ef4\u6301\u6280\u672f\u9886\u5148\u3002\u4e0d\u8fc7\uff0c\u8fd9\u79cd\u53cc\u91cd\u76ee\u6807\u5bfc\u81f4\u5176 EUV <a href=\"https:\/\/www.alphaseek.cn\/?tag=%e8%b5%84%e6%ba%90\" title=\"View all posts in \u8d44\u6e90\" target=\"_blank\" class=\"tag_link\">\u8d44\u6e90<\/a>\u88ab\u4e25\u91cd\u5206\u6d41\u3002<\/p>\n<p><strong>Intel \u7684 35 \u53f0 EUV<\/strong>\uff0c\u662f\u5176 IDM \u8f6c\u578b\u7684&ldquo;\u5e95\u6c14&rdquo;\uff1b<strong>SK \u6d77\u529b\u58eb\uff0829 \u53f0\uff09\u548c\u7f8e\u5149\uff085 \u53f0\uff09\u7684 EUV<\/strong>\u5e03\u5c40\uff0c\u5219\u805a\u7126\u4e8e\u5b58\u50a8\u82af\u7247\u7684 &ldquo;\u5de5\u827a\u4f18\u5316&rdquo;\u3002\u65e5\u672c Rapidus \u7684 1 \u53f0 EUV\uff0c\u66f4\u50cf\u662f\u65e5\u672c\u653f\u5e9c\u63a8\u52a8\u672c\u571f\u5148\u8fdb\u5236\u7a0b\u590d\u5174\u7684 &ldquo;\u7834\u51b0\u4e4b\u4e3e&rdquo;\u3002\u8fd9\u5bb6\u6210\u7acb\u4e8e 2022 \u5e74\u7684\u516c\u53f8\uff0c\u5f97\u5230\u4e86\u65e5\u672c\u653f\u5e9c 5000 \u4ebf<a href=\"https:\/\/www.alphaseek.cn\/?tag=%e6%97%a5%e5%85%83\" title=\"View all posts in \u65e5\u5143\" target=\"_blank\" class=\"tag_link\">\u65e5\u5143<\/a>\u7684\u8865\u8d34\u548c ASML \u7684\u6280\u672f\u652f\u6301\uff0c\u76ee\u6807\u662f\u5728 2027 \u5e74\u91cf\u4ea7 2nm \u82af\u7247\u3002<\/p>\n<p>\u7136\u800c\uff0c\u4ec5\u4ec5\u662fEUV\u7684\u7ade\u4e89\uff0c\u8fd8\u4e0d\u8db3\u591f\u3002\u5f53\u73b0\u6709 EUV\u7684\u5de5\u827a\u6781\u9650\u903c\u8fd1 2nm \u65f6\uff0cASML \u63a8\u51fa\u7684High-NA EUV\u6210\u4e3a\u4e86\u5148\u8fdb\u5236\u7a0b\u7ade\u4e89\u7684\u4e0b\u4e00\u4e2a\u6838\u5fc3\u6218\u573a\u3002<\/p>\n<p>ASML \u9996\u5e2d\u6267\u884c\u5b98 Christophe Fouquet\u9884\u8ba1<strong>High NA EUV\u5149\u523b\u673a\u5c06\u4e8e2027~2028\u5e74\u6b63\u5f0f\u6295\u5165\u5148\u8fdb\u5236\u7a0b\u7684\u5927\u89c4\u6a21\u91cf\u4ea7\u4f5c\u4e1a\u4e2d\u3002<\/strong>\u76ee\u524d\u5728<strong>\u5bfc\u5165\u65b0\u4e00\u4ee3\u56fe\u6848\u5316\u6280\u672f\u4e0a\u6700\u79ef\u6781\u7684\u662f<a href=\"https:\/\/www.alphaseek.cn\/?tag=%e8%8b%b1%e7%89%b9%e5%b0%94\" title=\"View all posts in \u82f1\u7279\u5c14\" target=\"_blank\" class=\"tag_link\">\u82f1\u7279\u5c14<\/a>\u4ee3\u5de5\uff0c<\/strong>\u5176\u652f\u6301 High NA EUV \u7684 Intel 14A \u8282\u70b9\u5c06\u5728 2027 \u5e74\u6b63\u5f0f\u63a8\u51fa\u3002Fouquet \u8868\u793a\uff0cHigh NA EUV \u5149\u523b\u673a\u76ee\u524d\u6b63\u7531\u82f1\u7279\u5c14\u7b49\u5ba2\u6237\u6d4b\u8bd5\uff0c\u7ed3\u679c\u663e\u793a\u65b0\u8bbe\u5907\u7684\u6210\u50cf\u548c\u5206\u8fa8\u7387\u8868\u73b0\u826f\u597d\uff0c\u8be5\u4f01\u4e1a2026 \u5e74\u7684\u4efb\u52a1\u4e4b\u4e00\u662f\u4e0e\u5ba2\u6237\u5408\u4f5c\u5c06\u8bbe\u5907\u7684\u505c\u673a\u65f6\u95f4\u6700\u5c0f\u5316\u3002Fouquet\u8fd8\u63d0\u5230\uff0cASML \u5bf9\u672a\u6765 10~15 \u5e74\u7684\u5927\u81f4\u6280\u672f\u8def\u7ebf\u5df2\u6709\u4e00\u5b9a\u7684\u6982\u5ff5\uff0c\u8be5\u4f01\u4e1a\u5df2\u542f\u52a8\u4e0b\u4e00\u4ee3 Hyper NA EUV \u7684\u7814\u7a76\u3002<\/p>\n<p>\u65e9\u57282023\u5e74\u672b\uff0cASML\u5c31\u5411\u82f1\u7279\u5c14\u4ea4\u4ed8\u4e86\u9996\u53f0High-NA EUV\u5149\u523b\u673a\uff0c\u578b\u53f7\u4e3aTWINSCAN EXE:5000\u7684\u7cfb\u7edf\u3002\u82f1\u7279\u5c14\u5c06\u5176\u4f5c\u4e3a\u8bd5\u9a8c\u673a\uff0c\u4e8e2024\u5e74\u6708\u5728\u7f8e\u56fd\u4fc4\u52d2\u5188\u5dde\u5e0c\u5c14\u65af\u4f2f\u52d2\u7684Fab D1X\u5b8c\u6210\u5b89\u88c5\u3002\u82f1\u7279\u5c14\u5ba3\u5e03\uff0c\u5df2\u5b89\u88c5\u4e86\u65b0\u7684TWINSCAN 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